World’s first surface-mount MEMS angular acceleration sensor

Murata announces the successful development of what is believes is the world’s first surface-mount MEMS angular acceleration sensor. Recent years have seen a growing customer demand for angular acceleration sensors with compact dimensions, which also feature high sensitivity, low noise and wide frequency band. Recognizing this demand, Murata combined its technology for designing inertial sensors, such as acceleration and gyro sensors with its MEMS (micro electro-mechanical sensor) process technology to successfully develop what is believed to be the world’s first surface-mount-type MEMS angular acceleration sensor. The accelerometer has dimensions of just 5.2mm x 2.5mm typ. x 0.8mm max. It incorporates a detection frequency band of more than 1kHz and an angular acceleration equivalent noise effective value of less than 1rad/s²ms. The unit has been patent registered in Japan and overseas and has more than 10 patents pending. Typical applications include the detection of angular acceleration and the detection of rotational vibration.