MEMS-based ultrasound transducer enables new industrial and medical use cases

Infineon Technologies AG has made notable progress in developing the capacitive micromechanical ultrasonic transducers (CMUT) technology. The technology allows the company to manufacture the first integrated one-chip solution for a MEMS-based ultrasonic transducer, offering a smaller footprint, improved performance, and higher functionality. Such integration makes the new device excellent for developing new ultrasonic applications and improving existing applications in consumer electronics, the automotive industry, and medical technology.

"Our ultrasonic technology can achieve a very high signal-to-noise ratio and offers a high level of integration. That's why we believe that the devices represent a breakthrough in the industry," says Emanuele Bodini, senior director at Infineon. "We want to leverage the technology to develop a product platform that is capable of serving multiple use cases through different industries."

Unlike conventional piezoelectric bulk materials, which rely on the deformation of the material itself, CMUT transmits and detects ultrasonic waves via the deflection of a micro-machined semiconductor diaphragm. This principle and their compact size, low power consumption, and high performance allow the devices to improve various ultrasound applications. Compared to a discrete solution, the company's monolithic integration of MEMS and ASIC reduces the noise floor by 20 times and improves the absolute signal by 1000 times compared to conventional piezoelectric ceramics of a similar size. Using its semiconductor design and manufacturing expertise, the company can apply its advanced technology across various industries, from consumer electronics to medical devices.

The company's CMUT technology enables solid-state touch buttons under any solid material, such as glass and metal, without deforming the surface. This permits a more durable and reliable alternative to conventional mechanical buttons to be implemented, lowering the risk of wear and tear, and increasing the overall lifespan of devices. Compared to capacitive touch buttons, which can be affected by environmental factors such as humidity and temperature, CMUT-based touch buttons offer full water compatibility and high EMC robustness. Since the technology lowers the size of the buttons, they can be integrated into various devices, from smartphones to industrial control panels. Examples include touch buttons below the metal frame of a mobile phone or replacing car door handles for a neat design.

Several home appliance devices can profit from CMUT as soon as they require liquid-level sensing. CMUT offer many advantages, including continuous fill level measurement, low power consumption, and easy, non-invasive mounting below the bottom of the tank. The latter is important to measure, e.g., chemicals in washing machines or dishwashers, where contact electrodes are at risk of corrosion.

The CMUT technology can also be employed to develop innovative medical devices that use ultrasound technology, such as wearable devices for vital signs monitoring, health tracking, and non-invasive medical diagnostics. Employing CMUT technology, the devices provide continuous monitoring and feedback rather than a single measurement, which can detect potential health issues earlier and improve patient outcomes. Their compact size and low-power requirements are ideal for wearable and point-of-care applications.