Highly-integrated micro-machined tri-axis digital accelerometers

Mouser now stocks Rohm's KX12x tri-axis +/- 2g, +/- 4g or +/- 8g silicon micro-machined digital accelerometers. They have integrated 2048-byte buffer, orientation, tap/double tap, activity detecting, and free fall algorithms. The sense element is fabricated using Kionix's proprietary plasma micromachining process technology. Acceleration sensing is based on the principle of a differential capacitance arising from acceleration - induced motion of the sense element, which further utilizes common mode cancellation to decrease errors from process variation, temperature, and environmental stress. The sense element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the device using a glass frit. A separate ASIC device packaged with the sense element provides signal conditioning and intelligent user-programmable application algorithms.