High-performance silicon micromachined linear accelerometers and inclinometers

Stocked by Mouser, these high-performance silicon micromachined linear accelerometers and inclinometers consist of a sensor element and an ASIC packaged in a 5mm x 5mm x 1.2mm dual flat no-lead. The sensor element is fabricated from single-crystal silicon with proprietary deep reactive ion etching processes, and is protected from the environment by a hermetically-sealed silicon cap at the wafer level. Designed to provide a high signal-to-noise ratio with integrated temperature compensation this series provides excellent performance over temperature. These sensors can accept supply voltages between 2.5V and 5.25V. Sensitivity is factory programmable allowing customisation for applications requiring from ±1.0g to ±4.0g ranges. Sensor bandwidth is user-definable. The sensor element functions on the principle of differential capacitance. Acceleration causes displacement of a silicon structure resulting in a change in capacitance. An ASIC, using a standard CMOS manufacturing process, detects and transforms changes in capacitance into an analog output voltage, which is proportional to acceleration. The sense element design utilizes common mode cancellation to decrease errors from process variation and environmental stress. Available in analog and multiplexed analog outputs and serial peripheral interface.