New impedance matching network provides ultra-fast and RF-synchronised tuning

Advanced Energy Industries, Inc. has released the NavX impedance matching network with industry-leading algorithms and direct generator communication, allowing superior levels of precise and repeatable plasma control, critical in 'Angstrom-Era' fabrication.

The company's matching network is specifically designed with direct match-generator communication and ultra-fast tuning using AE hardware and proprietary algorithms. This allows RF-synchronised impedance matching during multilevel pulse states to control plasma characteristics precisely. Paired with the eVerest generator, it completes the companyAE's latest RF delivery system (RFDS), allowing unparalleled control of plasma characteristics.

"Building on over 20 years of experience in developing advanced RF delivery systems for plasma processes, the NavX matching network redefines tuning speed, sophistication and RF synchronisation for exacting plasma control across the most complex pulsing profiles," said Juergen Braun, Advanced Energy's senior vice president of plasma power products. "The platform's groundbreaking selectable tuning algorithm, which enables impedance matching to multiple RF pulse states, instantly reduces reflected power in processes with shorter RF-on times."

The solution directly synchronises with the eVerest RF generator and includes proprietary Advanced Selectable Tuning and Velocity Tuning algorithms that optimise response speeds for pulse sequences. The system's +/-10% frequency span enables faster tuning and access to a wider impedance range. Intermodulation distortion (IMD) immunity maintains tuning accuracy in multi-frequency applications, and scalable pulse states supply a path to new energy regimes.

The matching network is fully compatible with the PowerInsight by Advanced Energy IoT platform, which delivers rapid access to high-resolution, actionable data that supports process optimisation.